Electrical and optical properties of TiO2anatase thin films

Electrical and optical spectroscopic studies of TiO2 anatase thin filmsdeposited by sputtering show that the metastable phase anatase differs in electronic properties from the well‐known, stable phase rutile

H. Tang; K. Prasad; R. Sanjinès; P. E. Schmid; F. Lévy

2002

Scholarcy highlights

  • Electrical and optical spectroscopic studies of TiO2 anatase thin filmsdeposited by sputtering show that the metastable phase anatase differs in electronic properties from the well‐known, stable phase rutile
  • Resistivity and Hall‐effect measurements reveal an insulator–metal transition in a donor band in anatase thin films with high donor concentrations. Such a transition is not observed in rutile thin films with similar donor concentrations
  • The smaller effective mass in anatase is consistent with the high mobility, bandlike conduction observed in anatase crystals
  • Luminescence of self‐trapped excitons is observed in anatase thin films, which implies a strong lattice relaxation and a small exciton bandwidth in anatase
  • Optical absorption and photoconductivity spectra show that anatase thin films have a wider optical absorption gap than rutile thin films
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