Sensors for sub-ppm NO2 gas detection based on carbon nanotube thin films

Carbon nanotubes(CNTs)deposited by plasma-enhanced chemical vapor deposition on Si3N4/Si substrates have been investigated as resistivegas sensors for NO2

L. Valentini

2003

Scholarcy highlights

  • Carbon nanotubes(CNTs)deposited by plasma-enhanced chemical vapor deposition on Si3N4/Si substrates have been investigated as resistivegas sensors for NO2
  • The maximum variation of resistance to NO2 was found at an operating temperature of around 165 °C
  • A thermal treatment method, based on repeated heating and cooling of the films, adjusted the resistance of the sensor film and optimized the sensor response to NO2

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