Performance of an energy-compensated three-dimensional atom probe

A wide acceptance angle first-order reflectron lens has been incorporated into a three-dimensional atom probe to provide improved mass resolution. This new 3DAP instrument is capable of resolving isotopes in the mass spectrum, with resolutions better than m/Δm=500 full width at half maximum and 250 full width at 10% maximum

A. Cerezo

2002

Scholarcy highlights

  • A wide acceptance angle first-order reflectron lens has been incorporated into a three-dimensional atom probe to provide improved mass resolution. This new 3DAP instrument is capable of resolving isotopes in the mass spectrum, with resolutions better than m/Δm=500 full width at half maximum and 250 full width at 10% maximum
  • This article addresses the detailed design of the energy compensated 3DAP, and the minimization and compensation of chromatic aberrations in the imaging performance of the instrument
  • Resolution test mask supplied by Graticules Limited, Morley Road, Tonbridge, Kent, UK
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