Fabrication, and testing of electronic sensor array based on single-walled carbon nanotubes
2006
Key concepts
Scholarcy highlights
- Fabrication, and testing of electronic sensor array based on single-walled carbon nanotubes
- Multiple sensor elements consisting of isolated networks of SWNTs were integrated into Si chips by chemical vapor deposition and photolithography processes
- A sensor array was fabricated by site-selective electroplating of Pd, Pt, Rh, and Au metals on isolated SWNT networks located on a single chip
- The resulting electronic sensor array, which was comprised of several functional SWNT network sensors, was exposed to a randomized series of toxic/combustible gases
- Journal of Physics and Chemistry of Solids2021,158 , 110230
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