Electro-optical characterization of IC compatible microcantilevers

Experimental In this study, we have developed high quality and reliable piezoelectric cantilevers for mechanical systems applications

A. PĂ©rez-Campos

2015

Scholarcy highlights

  • Micro-electro-mechanical systems comprise an emerging platform for many different applications, such as telecommunication, biosensing, or automotive
  • Results and discussion the experimental results obtained to study the properties of the microcantilevers and their piezoelectric behaviour as LDV measurements and white light interferometry as well as their comparison to computer simulations are presented
  • The X-ray diffraction technique has been widely used in this work, since aluminum nitride exhibits piezoelectric properties only when the thin film is oriented in the c-axes
  • The high sensitivity of the vibrometer allowed us to detect both flexural modes as well as torsional modes with a symmetrical displacement referred to the line of symmetry along the cantilever
  • finite element method simulations could be compared with the eigenfrequencies of the cantilever and the corresponding modal shapes with the experimental results
  • Despite the small differences in the values of the resonance frequency, the experimental images precisely follow the FEM data, probing the viability of these piezoelectric microcantilevers fabricated at low temperature and compatible with CMOS technology to be implemented as both sensing as well as actuating MEMS devices

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